A clean room is an environment, primarily used in developing as well as performing scientific research having environmental contaminants such as dust, airborne microorganisms, aerosol particles, and chemical vapors are at a minimum. A clean room has a more precise level of pollution that can be explained by the number of particles of a specific size. This study focuses on the air handling unit of cleanroom air conditioning system. Various methods related to clean room air conditioning systems are reviewed along with finding the energy efficiency for recirculating air conditioning systems, calculating fan power intensity for re-circulation air systems, the air change rates and its relation with cleanroom velocities.

Keywords : Cleanroom, Air Conditioning System, Fan Power, Recirculation Air Systems, Energy Efficiency